Launch of industrial lenses Rayfact RF3-6x variable magnification lens and Rayfact RF3-6x prism-type variable magnification lens for industrial cameras

Nikon Corporation is pleased to announce the release of the industrial lenses `Rayfact RF3-6x variable magnification lens` and `Rayfact RF3-6x prism-type variable magnification lens`. Part of the Rayfact RF series, these industrial lenses are fully compatible with high-resolution line scan cameras^*1 and large area scan cameras,^*2 making them an ideal choice for inspecting microscopic patterns on semiconductor wafers and flat panel displays (FPD) substrates.

The Rayfact RF3-6x variable magnification lens and Rayfact RF3-6x prism-type variable magnification lens are specifically designed for high-precision visual inspection of microscopic patterns on next-generation semiconductor packages and micro-LED panels. These lenses deliver enhanced resolution and sharper image compared to previous models, ensuring superior performance in detecting microscopic defects. Furthermore, the Rayfact RF3-6x prism-type variable magnification lens features an optical systems optimized for incident illumination, tailored to meet the demands of various inspection applications and environments.

These lenses will be exhibited at the 39th Nepcon Japan taking place at Tokyo Big Sight from January 22nd to 24th, 2025.

• *1Inspection camera with a single row of photosensitive sensors to capture images by scanning the entire inspection target one line at a time.
• *2Inspection camera with photosensitive sensors arranged like a grid over a surface to capture an image of a specific area at a time.

Product name        Rayfact RF3-6x variable magnification lens
                                Rayfact RF3-6x prism-type variable magnification lens
Order start date     February 1, 2025

• Variable 3- 6x magnification range in a single lens
• Consistent performance with minimal variation across the entire magnification range
• Designed with optics that maximize the performance of high-resolution large line sensor cameras^* with an 82mm image circle
• Bright and clear imaging at F1.8
• Includes an optically optimized model designed for placing prisms on the object side (Coaxial illumination: 30mm thickness)
• Equipped with gears on the aperture ring and floating ring, allowing external control of the aperture and floating mechanisms

• *Compatible large-size line sensors: 3.5µx23K / 5µx16K

Model                                           BA01941/BA01951 (prism type)
Operating magnification range -3 - -6x
F Number (∞)                              F1.8 - F11
Wavelength range (nm)              400 - 700
Image size (mm)                          Φ82
Mount                                           M67 (P=0.75) external screw
Diameter/length (mm)^{*1, *2}         Φ110 x 166.1
Weight (g)^*1                                 Approx. 2,450
 

Optical Specifications

Magnification                                 -3x     -3.5x  -5x     -6x
Focal length (mm)^*1                       108.9 108.4 107.5 107.1
NA^*1                                                0.208 0.214 0.226 0.231
Object-to-image distance (mm)^*1 593.3 640.1 787.3 888.3
Working distance (mm)^*1              93.3   88.3   79.4   75.5
Distortion (%)^{*1, *3}                         ≦ 0.07
Relative illumination (%)^{*1, *3}       ≧ 90
Object size (mm)                            27.3   23.4   16.4   13.7

• *1 Specifications for the Rayfact RF3-6x prism-type variable magnification lens
• *2Excludes the lock screw and mounting screw.
• *3Measured at the maximum image height (Y’=41.0 mm) and F1.8.

The information is current as of the date of publication. It is subject to change without notice.